We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.
展开▼
机译：我们通过结合胶体光刻和反应离子刻蚀的可扩展且兼容集成电路的工艺，证明了表面轮廓控制的密排Si纳米棒阵列（NRA）的制造。 Si NRA具有宽带，全向和偏振不敏感的抗反射（AR）特性，并增强了疏水性。系统研究了周期性NRA的表面轮廓对AR和疏水性的影响。 Si NRA既充当自清洁层又充当AR层，这为提高太阳能电池的能量转换效率提供了一种有前途的方法。
展开▼
